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Low-Power, Multimodal Laser Micromachining of Materials for Applications in sub-5 ?μm Shadow Masks and sub-10 ?μm Interdigitated Electrodes (IDEs) Fabrication
摘要： Laser micromachining is a direct write microfabrication technology that has several advantages over traditional micro/nanofabrication techniques. In this paper, we present a comprehensive characterization of a QuikLaze 50ST2 multimodal laser micromachining tool by determining the ablation characteristics of six (6) different materials and demonstrating two applications. Both the thermodynamic theoretical and experimental ablation characteristics of stainless steel (SS) and aluminum are examined at 1064 nm, silicon and polydimethylsiloxane (PDMS) at 532 nm, and Kapton? and polyethylene terephthalate at 355 nm. We found that the experimental data aligned well with the theoretical analysis. Additionally, two applications of this multimodal laser micromachining technology are demonstrated: shadow masking down to approximately 1.5 μm feature sizes and interdigitated electrode (IDE) fabrication down to 7 μm electrode gap width.
关键词： interdigitated electrodes,ablation characteristics,multimodal laser micromachining,shadow mask
更新于2025-09-19 17:13:59
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Máscaras mecanicas de sombra por eletrocorros?o para dispositivos eletro-ópticos
摘要： Shadow masks are used in manufacturing processes for electro-optic devices to transfer patterns with different shapes and dimensions. For fabrication of organic based devices, shadow masks should be made of materials stable against organic solvents, high temperature, and robust, remaining unchanged after multiple cycles of use and fixation. Thus, stainless steel is suitable for shadow masks. A simple, cheap and quick method of obtaining shadow masks by electrochemical corrosion of stainless steel is reported. The shadow mask was used to evaporate cathode material to obtain an organic light emitting diode with active area of 9 mm2. This device exhibited a turn-on voltage of 5 V and luminance of 14 cd/m2.
关键词： electro-optic devices,electrochemical corrosion,shadow mask
更新于2025-09-09 09:28:46