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3D GaN Fins as a Versatile Platform for a-Plane-Based Devices
摘要： GaN fins on GaN-on-sapphire templates are fabricated by continuous mode selective area metalorganic vapor phase epitaxy. The fins exhibit high aspect ratios and smooth nonpolar a-plane sidewalls with an ultra-low threading dislocation density of a few 105 cm?2 making them ideally suited for optoelectronic to electronic applications. A detailed analysis of the inner structure of GaN fins is provided by the help of marker layer experiments and correlation of results from fins fabricated under different growth conditions, leading to the development of a growth model to explain the final geometry and optical as well as electrical properties of these high aspect ratio fins. Distinctly different material properties for the central and outer parts of the fins are detected. Whereas the outer sidewalls represent high quality GaN surfaces with very low defect densities, a strong quenching of near band edge emission (NBE) in the central part of the fins is accompanied by heavy compensation of free electrons. A possible explanation is the incorporation of excessive point defects, like intrinsic defects or carbon impurity. The sidewall regions, however, prove to be highly suitable for device applications due to their strong NBE emission, low dislocation density, and high free carrier concentration.
关键词： marker layers,threading dislocation density,GaN fins,selective-area MOVPE,a-plane sidewalls
更新于2025-09-23 15:22:29
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A discrete core-shell-like micro-light-emitting diode array grown on sapphire nano-membranes
摘要： A discrete core-shell-like micro-light-emitting diode (micro-LED) array was grown on a 100 nm-thick sapphire nano-membrane array without harmful plasma etching for chip singulation. Due to proper design for the sapphire nano-membrane array, an array of multi-faceted micro-LEDs with size of 4 μm × 16 μm was grown. threading dislocation density in the micro-LeD formed on sapphire nano-membrane was reduced by 59.6% due to the sapphire nano-membranes, which serve as compliant substrates, compared to GaN formed on a planar substrate. Enhancements in internal quantum efficiency by 44% and 3.3 times higher photoluminescence intensity were also observed from it. Cathodoluminescence emission at 435 nm was measured from c-plane multiple quantum wells (MQWs), whereas negligible emissions were detected from semi-polar sidewall facets. A core-shell-like MQWs were formed on all facets, hopefully lowering concentration of non-radiative surface recombination centers and reducing leakage current paths. This study provides an attractive platform for micro-LEDs by using sapphire nano-membrane.
关键词： internal quantum efficiency,photoluminescence,threading dislocation density,micro-LED,sapphire nano-membrane,core-shell-like,cathodoluminescence
更新于2025-09-23 15:21:01
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Defects and their reduction in Ge selective epitaxy and coalescence layer on Si with semicylindrical voids on SiO<formula><tex>$_{2}$</tex></formula> masks
摘要： Formation of semicylindrical voids on SiO2 masks in Ge layers selectively grown on Si has positive impacts for reduction of threading dislocation density (TDD). Semicylindrical voids are formed through selective epitaxial growth (SEG) and coalescence of SEG Ge layers. A cross-sectional transmission electron microscope (TEM) observation reveals that a threading dislocation (TD) is terminated at a semicylindrical void, resulting in the reduction of TDD. The semicylindrical voids also contribute to the suppression of two-dimensional defects generated at the coalesced interfaces between the SEG Ge layers, which were widely observed in previous reports. Plan-view TEM observations reveal that there are TDs inclined to be parallel to the semicylindrical voids, and plan-view TEM observations show a large (4 μm × 4 μm) TD-free area in the Ge layer with the semicylindrical voids.
关键词： silicon photonics,threading dislocation density,germanium (Ge),semiconductor epitaxial layers,Epitaxial growth
更新于2025-09-10 09:29:36