- 标题
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Polycrystalline diamond films with tailored micro/nanostructure/doping for new large area film-based diamond electronics
摘要： This paper describes processes developed to change two key electrical properties (electrical resistivity and carrier type) of ultrananocrystalline diamond (UNCD) to microcrystalline diamond (MCD) films. The results show that the electrical properties of the investigated polycrystalline diamond films depend on the grain size and plasma treated grain boundary networks interfaces and external films’ surfaces, in which hydrogen, fluorine or nitrogen can be incorporated to tailor electrical carriers-type to tune the electrical properties. Exploring the feasibility of modulating the resistivity of polycrystalline diamond films via tailoring of grain size, surface chemistry and nitrogen or fluorine incorporation into films’ grain boundaries and external surfaces may enable applications of these diamond films as active or heat dissipation layers on micro/nano-electronic devices. This work can open the pathway to enabling an industrial process for new diamond-based electronics, since polycrystalline diamond films can be grown with extreme uniformity on 300 mm diameter Si wafers, used in manufacturing of current Si-based micro/nano-electronic devices.
关键词： Nitrogen incorporation,Diamond-based electronics,Electrical properties,Plasma treatment,Fluorine incorporation,Grain size,Polycrystalline diamond films
更新于2025-09-10 09:29:36
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Nanocarbon colloid produced by electro-spark discharge in ethanol for seeding the substrates in MPACVD synthesis of polycrystalline diamond films
摘要： We produced a nanocarbon colloid by electro-spark discharge as substrate seeding for microwave plasma-assisted chemical vapor deposition (MPACVD) synthesis of micro- and nano-crystalline diamond films and solid free-standing microcrystalline diamond plates. The colloid was produced by a specially designed device via a pulse electro-spark discharge in ethanol. The nanocrystalline diamond films and polycrystalline plates that were grown were examined by optical, SEM and TEM microscopies and Raman spectroscopy.
关键词： MPACVD,electro-spark discharge,nanocarbon colloid,polycrystalline diamond films
更新于2025-09-10 09:29:36