Overview on Monolithically Integrated Arrays of Microtubular Vertical Resonators on Photonic Waveguides for Optofluidic Applications

摘要： A novel platform for optofluidic applications is realized by monolithic integration of an array of ultra-compact three-dimensional (3D) vertically rolled-up microtube ring resonators (VRU-MRRs) with polymer waveguides. The on-chip integrated system is realized by rolling up 2D differentially strained TiO2 nanomembranes into 3D microtubular cavities on a nanophotonic chip. Whispering-gallery modes are observed in the telecom wavelength range, and their spectral peak positions shift significantly when measurements are performed while immersing the tubes or filling their hollow cores with water. The achievement of this work opens up fascinating opportunities to realize massively parallel optofluidic microsystems with exceptional multi-functionality for analysis of biomaterials in lab-in-a-tube systems on a single chip.