Dewetting mechanisms and their exploitation for the large-scale fabrication of advanced nanophotonic systems

摘要： Recent progress in submicron- and nano-fabrication technologies has led to the emergence of novel photonic structures such as optical nanoantennas and metasurfaces. Real-life applications of these advanced photonic structures still require substantial improvement of the fabrication processes, in terms of their throughput and cost-effectiveness. Because of its simplicity and effectiveness, dewetting of a thin film has attained increasing attention as a feasible process for improving the scalability and productivity. Here, we provide an overview of the mechanisms and phenomenologies of dewetting to foster an improved fundamental understanding necessary for the optimisation of the dewetting process condition and template design. We then review the strategies demonstrating the use of templated-dewetting for producing well-aligned arrays of submicron- and nanostructures with great control over their size, shape and arrangement. Recent applications of dewetted structures in advanced nanophotonics are reviewed with an emphasis on the exploitation of dewetting mechanisms. Special attention is given to the fabrication of resonant optical nanoantennas and nanophotonic applications in which high repeatability and throughput are important parameters: sensing, colourisation, photovoltaics and nonlinear light frequency conversion. We expect this review to provide a basis for the use of thin-film dewetting to realise the industrial-level fabrication of various practical advanced photonic systems.