Development of an optical pressure measurement system using an external cavity diode laser with a wide tunable frequency range

摘要： Optical pressure measurement systems can precisely measure pressure from vacuum to high pressure with a single apparatus. However, the continuously measurable range without interrupting measurement is limited to less than 1 kPa. In this study, an optical pressure measurement system with a wide continuous measurable range was developed. The optical system can continuously measure a pressure range of 18 kPa when using nitrogen gas by using a Littrow external cavity diode laser as its light source. First, discrete pressure points from vacuum to atmospheric pressure were measured. The repeatability and non-linearity of the differences between the measured values had standard deviations of 0.1 Pa and 0.5 Pa, respectively. Next, a pressure range from 91 kPa to 109 kPa was continuously measured. The results showed that the linearity characteristics of gauges as a function of pressure can be evaluated precisely using our optical pressure measurement system.