研究目的
Investigating the fabrication and properties of single-mode infrared-fiber waveguides on ZnSe single crystals using ion implantation and lithography techniques.
研究成果
The study successfully fabricated single-mode planar and channel waveguides on ZnSe single crystals using ion implantation and lithography techniques. The waveguides exhibited excellent light confinement properties at the infrared-fiber wavelength, demonstrating potential for applications in integrated photonic systems.
研究不足
The study is limited by the specific conditions of ion implantation and lithography techniques used, which may not be universally applicable. The waveguide properties are also dependent on the quality of the ZnSe single crystal and the precision of the fabrication process.
1：Experimental Design and Method Selection:
The study employs
2：0 MeV C and O ion implantation combined with standard lithography techniques to fabricate planar and channel waveguides on ZnSe single crystals. The prism-coupling method and end-face coupling system are used to measure the waveguide properties. Sample Selection and Data Sources:
ZnSe single crystal samples with dimensions of 1 × 1 ×
3：1 cm3 were used, optically polished, and implanted with C and O ions. List of Experimental Equipment and Materials:
Equipment includes a
4：0 × 7 MV tandem accelerator for ion implantation, a Model 2010 prism coupler, a diode laser, a CCD camera, and a micro-Raman spectrometer (Horiba/Jobin Yvon HR800). Experimental Procedures and Operational Workflow:
Samples were implanted with C and O ions at specific energies and fluences, with some samples covered with photoresist masks for channel waveguide fabrication. Waveguide properties were then measured using the prism-coupling method and end-face coupling system.
5：Data Analysis Methods:
The effective refractive indices and near-field intensity distributions were analyzed, and microstructural changes were assessed using micro-Raman spectrometry.
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