研究目的
Investigating the integration of mid-infrared light sources on silicon-based waveguide platforms for applications in spectroscopic sensing, thermal imaging, and infrared countermeasures.
研究成果
The paper demonstrates the feasibility of integrating mid-infrared light sources on silicon-based waveguide platforms, highlighting the potential for compact, functional photonic circuits. It identifies key challenges and suggests future directions for improving laser performance and thermal management.
研究不足
The study notes challenges in fabricating integrated ICLs and QCLs on silicon waveguides, including sidewall leakage and thermal management issues. The performance of integrated lasers is currently lower than those on native substrates, indicating areas for optimization.
1：Experimental Design and Method Selection:
The study discusses the operation of silicon-on-insulator (SOI) and Ge-on-Si waveguides beyond
2：0 μm wavelength, focusing on waveguide core thickness and cladding materials' effects on propagation loss. Sample Selection and Data Sources:
Utilizes SOI and Ge-on-Si waveguides with varying core thicknesses and cladding materials.
3：List of Experimental Equipment and Materials:
Includes deep reactive ion etching (DRIE) tools, PECVD and sputtered SiN films, and various waveguide configurations.
4：Experimental Procedures and Operational Workflow:
Describes the fabrication of waveguides, measurement of propagation losses, and integration of interband cascade lasers (ICLs) and quantum cascade lasers (QCLs) on silicon waveguides.
5：Data Analysis Methods:
Uses simulation for mode profiles and measured propagation losses to evaluate waveguide performance.
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