摘要： The combination of broadband quantum cascade lasers (QCLs) with a micro-electro-mechanical system (MOEMS) scanner with integrated diffraction grating as a wavelength-selective and optical feedback providing element enables the realization of compact, portable and robust spectroscopy systems. As previously showed [1–2], such MOEMS-based external cavity (EC)-QCLs configurations lead to measurement times as low as ~1 millisecond per QCL-tuning range (hundreds of cm-1) while eliminating the need of homodyne detection systems, such as lock-in electronics. Also non-resonant (quasistatic) MOEMS grating scanners providing scan rates of tens of Hz as well as static setting of arbitrary wavelengths are possible, keeping the advantage of using small MOEMS footprints, ruggedness, and low power consumption. Here we review our latest developments in MOEMS-based EC-QCLs made by Fraunhofer IAF and IPMS. We present a miniaturized, non-resonant MOEMS EC-QCL that allows scan frequencies of few tens of Hz (as well as static operation) together with an excellent wavelength reproducibility within a small and compact device. Static-controllable MOEMS EC-QCLs are of high interest for spectroscopy applications that require both arbitrary tuning speeds (e.g. large time constants as in photothermal or photoacoustic spectroscopy) and discrete wavelength tuning. Such tuning speeds are not achievable with resonantly-driven MOEMS scanners, as their mechanical resonance frequency remains >120 Hz. Both requirements can be well fulfilled with static-controllable MOEMS EC-QCLs independently of the QCL gain bandwidth characteristics. We also present a resonantly-driven continuous wave (cw) MOEMS EC-QCL with cavity-length control to enable fast high-resolution fast spectroscopy over a spectral range of >100 cm-1 and discuss our progress towards a dispersion-free beam spot radius for MOEMS EC-QCLs and our approach to operate MOEMS EC-QCLs in a permanent low-noise regime.