研究目的
To investigate the optical performance of high-resistivity silicon with a laser-ablated surface in the transmission mode in the frequency range from 0.1 to 4.7 THz and to understand the influence of fabrication parameters and processing environment on the THz performance.
研究成果
The optical performance of the HR-Si with the laser-ablated surface has been investigated, showing a reciprocal relationship between the THz transmission and the surface roughness values. The majority of optical losses are due to the scattering but not due to the absorption in laser-ablated silicon compounds. The results are promising for the development of phantoms of skin and biological tissues.
研究不足
The study was limited to the frequency range of 0.1-4.7 THz and the effects of laser ablation on high-resistivity silicon. The influence of other materials or frequency ranges was not investigated.
1：Experimental Design and Method Selection:
The study involved laser ablation of high-resistivity silicon (HR-Si) using picosecond and nanosecond duration laser pulses in ambient air and argon-enriched atmosphere. The optical performance was studied in the transmission mode in the frequency range of
2：1-7 THz. Sample Selection and Data Sources:
37 samples on HR-Si were fabricated, changing the processing parameters such as the pulse repetition rate, pulse energy, impulse overlap, and processing environment.
3：List of Experimental Equipment and Materials:
A galvanometric scanner (HurryScan 14 from Scanlab), a 160 mm focal length f-theta lens (LINOS/Rodenstock), and a fundamental harmonic of the laser: Atlantic-60 and Baltic-HP (Ekspla Ltd.).
4：Experimental Procedures and Operational Workflow:
The silicon was laser-ablated into a depth of about 30±4 μm to develop a rough surface with an area of 6x6 mm
5：The THz performance was investigated using THz time-domain spectroscopy (THz TDS) systems. Data Analysis Methods:
The transmittance dispersion occurring due to the surface roughness of laser-ablated HR-Si was calculated using the THz wave scattering theory.
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