研究目的
To systematically compare the effects of thermal annealing and CO2 laser treatment on TiO2 thin films prepared by sol-gel processing, focusing on film thickness, refractive index, and the formation of anatase and rutile phases.
研究成果
Sol-gel derived TiO2 films with comparable average film thickness and refractive index can be prepared by thermal annealing and CO2 laser processing. The choice of curing method affects phase content and grain size, with oven treatment resulting in anatase crystallites and laser treatment producing coarser rutile grains. Further optimization of laser parameters is needed for structural film uniformity.
研究不足
The study notes that for applications requiring structural film uniformity, laser processing needs optimization. The partial melting of glass and the formation of bubbles in transitional zones during laser treatment are highlighted as areas needing further investigation.
1：Experimental Design and Method Selection:
The study involved preparing TiO2 thin films by dip-coating from coating solutions based on soluble precursor powders, followed by thermal annealing in a furnace and CO2 laser irradiation.
2：Sample Selection and Data Sources:
Borosilicate glass substrates were used for film deposition.
3：List of Experimental Equipment and Materials:
A CO2 laser (Firestar ti-60, Synrad, Inc.), UV-Vis-spectrometer (Shimadzu UV-3100), X-ray diffractometry (XRD; Empyrean, Malvern Panalytical Ltd.), and scanning electron microscopy (SEM; Supra 55VP, Carl Zeiss AG) were used.
4：Experimental Procedures and Operational Workflow:
Films were dried at 80°C, then thermally annealed or laser-treated. UV-Vis spectrometry, XRD, and SEM were used for characterization.
5：Data Analysis Methods:
Film thickness and refractive index were calculated using Fresnel equations. Crystallite sizes were calculated using the Scherrer equation.
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