研究目的
Investigating the design and performance of a disk-shaped Ge-on-Si photodetector with a recess structure for refractive-index difference sensing.
研究成果
The proposed disk-shaped Ge-on-Si photodetector with a recess structure shows improved sensitivity and detection capabilities for refractive-index sensing, making it suitable for applications requiring small-scale sensors.
研究不足
The study is based on simulations, and practical implementation may face challenges such as fabrication complexity and integration with existing systems.
1:Experimental Design and Method Selection:
The study employed a Finite-Difference Time-Domain (FDTD) method for simulation to evaluate the sensor's performance.
2:Sample Selection and Data Sources:
The simulations were based on a 220 nm SOI platform with a 2 μm thick buried oxide (BOX) layer.
3:List of Experimental Equipment and Materials:
The study used Lumerical Inc.'s FDTD and MODE solutions for simulations.
4:Experimental Procedures and Operational Workflow:
The simulation involved varying geometric parameters such as disk thickness, radius, and size to analyze the sensor's performance.
5:Data Analysis Methods:
The performance was evaluated based on sensitivity (S), quality factor (Q), and intrinsic limit of detection (ILOD).
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