摘要： Femtosecond laser ablation processing is applied for surface modification and micropatterning of diamond-like nanocomposite (DLN) films (a-C:H:Si:O films). Using a visible femtosecond laser (wavelength 515 nm, pulse duration 320 fs), microgroove patterns have been fabricated on the DLN films, aimed at further studies of their properties. The studies were focused on (i) structural transformations in the surface layers using Raman spectroscopy and transmission electron microscopy (TEM), (ii) wettability of laser-patterned films, and (iii) nano/microscale friction properties of laser-patterned DLN films using lateral force microscopy. Raman spectroscopy and TEM data showed characteristic features of the surface graphitization during ultrashort-pulse ablation. High resolution TEM study of the microgrooves revealed the formation of cubic SiC nanocrystals (4–8 nm size) on the laser-ablated surface. The water contact angle measurements showed anisotropic wetting behavior of the grooved surfaces (the contact angle was different in the directions parallel and perpendicular to microgrooves), depending on the groove depth (aspect ratio). Lateral force microscopy examination (with micro-sized Si tips) showed that the laser-patterned regions exhibited low friction properties compared to the original surface. The obtained results demonstrate that femtosecond laser processing is an effective technique to generate new properties of hard DLN coatings at the micro and macroscale.