研究目的
To overcome the difficulty in the high-precision integral fabrication of high-working-frequency terahertz hollow-core metal rectangular waveguides due to their small end face size and the need for strict dimensional accuracy and high internal surface quality.
研究成果
The innovative combined process of WECMM, electrochemical deposition, and selective chemical dissolution successfully realizes the integral fabrication of terahertz hollow-core metal rectangular waveguides with high precision. The process is flexible, controllable, and suitable for high-working-frequency applications, offering better transmission performance of terahertz signals.
研究不足
The study focuses on the fabrication of a 1-THz hollow-core metal rectangular waveguide. The applicability of the combined process to waveguides with higher-working frequencies or different materials is not extensively explored.
1：Experimental Design and Method Selection:
The study proposes an innovative combined process of wire electrochemical micromachining (WECMM), electrochemical deposition, and selective chemical dissolution.
2：Sample Selection and Data Sources:
A nickel foil of thickness 130 μm was used as the anode workpiece for WECMM.
3：List of Experimental Equipment and Materials:
Equipment includes a WECMM system, DC power supply, air-bearing spindle, thermostatic magnetic stirrer, and ultrasonic cleaner. Materials include tungsten wire, pure nickel foil, gold potassium citrate solution, and nickel-etching agent.
4：Experimental Procedures and Operational Workflow:
The process involves WECMM of a rectangular mandrel, gold electroplating onto the mandrel, selective chemical dissolution of the mandrel, and copper micro-electroforming on the external surface of the pure-gold terahertz rectangular waveguide micro-cavity.
5：Data Analysis Methods:
The dimensional accuracy, surface roughness, and edge radius of the fabricated waveguide were measured and analyzed.
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