研究目的
To eliminate the need for a seed layer and its subsequent removal by directly electrodepositing onto a transparent conductive substrate suitable for plasmonic applications.
研究成果
The study demonstrates a gold electrodeposition process on conductive oxide without a gold seed layer, with achievable features below 30 nm at ~100 nm structural height. Different types of tall plasmonic nanostructures have been successfully fabricated based on this technique, which can be used platforms for many applications, such as biochemical sensing.
研究不足
The study does not discuss the scalability of the proposed method for industrial applications or the long-term stability of the fabricated nanostructures.
1:Experimental Design and Method Selection:
The study proposes using glass coated with a thin layer of Indium Tin Oxide (ITO) as the substrate for electrodeposition through an EBL-defined template.
2:Sample Selection and Data Sources:
The study involves simulations of a u-shaped split ring resonator (uSRR) on substrates of SiO2, gold, and ITO.
3:List of Experimental Equipment and Materials:
The fabrication techniques utilize a post-EBL cold-sonicated development process. Gold electrodeposition was performed at room temperature using the electrolyte potassium dicyanoaurate(I) and a platinized titanium anode.
4:Experimental Procedures and Operational Workflow:
The structures may be formed in one of two ways, depending on whether positive or negative resist is used.
5:Data Analysis Methods:
FDTD simulations were performed to see the effect of substrate material on the transmission and reflection spectra of a typical nanostructure.
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