研究目的
Investigating the role of plasma-plume expansion in the selection of vapor-liquid-solid (VLS) vs vapor-solid (VS) growth modes during pulsed laser deposition (PLD) of tin-doped indium oxide (ITO) in an inert-gas environment.
研究成果
The study demonstrates that the morphological design of complex oxides during PLD can be controlled by tuning the plasma-plume expansion through N2 pressure and pulse frequency. This approach enables the selection between VLS and VS growth modes, offering a route to tailor the optical and electronic properties of functional complex oxide devices.
研究不足
The study is limited to the PLD of ITO in an inert N2 atmosphere. The findings may not be directly applicable to other complex oxides or different deposition environments. The role of substrate temperature and other gas species was not explored.
1:Experimental Design and Method Selection:
- Pulsed laser deposition (PLD) was performed using a 248 nm KrF excimer laser with 20 ns pulse width.
2:999% pure N2) with varying N2 gas pressures and pulse frequencies.
Sample Selection and Data Sources:
2. Sample Selection and Data Sources:
- Samples were prepared using N2 gas pressures in the range of 7–740 mTorr and pulse frequencies in the range of 2.5–10 Hz.
3:5–10 Hz.
- Multiple samples were prepared for each set of conditions.
List of Experimental Equipment and Materials:
3. List of Experimental Equipment and Materials:
- KrF excimer laser (248 nm, 20 ns pulse width).
4:999% pure).
- ITO target (90–10 wt. % In2O3-SnO2).
Experimental Procedures and Operational Workflow:
4. Experimental Procedures and Operational Workflow:
- Substrates were sonicated, dried, and attached to the platen.
5:8 J/cm2 fluence.
- Substrate temperature was maintained at 550°C.
- Samples were cooled in the N2 atmosphere post-deposition.
Data Analysis Methods:
5. Data Analysis Methods:
- Crystallinity and surface morphology were examined using θ-2θ x-ray diffraction (XRD), scanning electron microscopy (SEM), and atomic force microscopy (AFM).
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