研究目的
To synthesize amorphous As-S-based chalcogenide glassy semiconductors within a large compositional space by a PECVD-based approach, to study the composition-structure-optical property relationship of the chalcogenide films and to investigate the impact of ex-situ laser irradiation on the films structural and optical properties in terms of different practical applications.
研究成果
The synthesis of amorphous As-S films with varying arsenic content by PECVD revealed a composition-structure-optical properties relationship. Laser irradiation induced the formation of micro/nanocrystalline inclusions, leading to photoluminescence emission. The type of crystalline phase formed depended on the initial film composition, with potential applications in medicine, optoelectronics, and integrated optics.
研究不足
The study is limited to As-S films with arsenic content from 35 to 55 at.% synthesized by PECVD. The impact of laser irradiation is studied only at 473 nm wavelength. The formation of crystalline phases and their effects on optical properties are explored, but the mechanisms of photo-induced changes could be further investigated.
1：Experimental Design and Method Selection:
The synthesis of amorphous As-S films was achieved using the PECVD method, varying the arsenic content from 35 to 55 at.%. The impact of composition and ex-situ laser irradiation on the structure and optical properties was studied.
2：Sample Selection and Data Sources:
Films were synthesized on NaCl substrates, and their composition, thickness, and surface roughness were measured. Optical properties were studied using transmission and reflection measurements.
3：List of Experimental Equipment and Materials:
PECVD equipment, RF generator (13.56 MHz, 30 W), MII-4M micro-interferometer, Shimadzu XRD-7000 X-ray diffractometer, NTEGRA Spectra system for Raman and PL spectroscopy, Carry 5000 spectrophotometer, Spectrum BX II FT-IR spectrometer, Smena atomic force scanning head.
4：56 MHz, 30 W), MII-4M micro-interferometer, Shimadzu XRD-7000 X-ray diffractometer, NTEGRA Spectra system for Raman and PL spectroscopy, Carry 5000 spectrophotometer, Spectrum BX II FT-IR spectrometer, Smena atomic force scanning head.
Experimental Procedures and Operational Workflow:
4. Experimental Procedures and Operational Workflow: Films were synthesized under controlled conditions, followed by characterization using XRD, Raman and PL spectroscopy, AFM, and optical measurements. Laser modification was performed using a 473 nm laser.
5：Data Analysis Methods:
Optical band gap was calculated by the Tauc method, and Urbach energy was determined by the Urbach method. Raman spectra were analyzed to identify structural units.
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