研究目的
Investigating the application of electrostatically doped silicon nanowire arrays for multispectral photodetectors to improve quantum efficiency and spectral response tuning.
研究成果
The study demonstrates that electrostatically doped silicon nanowire arrays can significantly improve quantum efficiency and enable spectral response tuning for multispectral photodetectors. This approach offers a promising alternative to traditional doping methods for nanoscale active devices.
研究不足
Technical constraints include the difficulty in fabricating shallow junctions using traditional doping methods and potential areas for optimization in surface passivation, morphology, doping, and contact optimizations.
1:Experimental Design and Method Selection:
Fabrication of radial heterojunction photodiodes by conformal coating of indium oxide layer on silicon nanowire arrays.
2:Sample Selection and Data Sources:
Use of n-type silicon wafer for nanowire fabrication.
3:List of Experimental Equipment and Materials:
Electron beam lithography, inductively coupled reactive ion etching, atomic layer deposition for In2O3 coating.
4:Experimental Procedures and Operational Workflow:
Fabrication of SiNWs, HF treatment, ALD process for In2O3 coating, electrical and optical characterization.
5:Data Analysis Methods:
Finite difference time domain simulations for optical characteristics, machine learning for wavelength identification.
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optical chopper system
SR540
Stanford Research Systems
Chopping light for measurement
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lock-in amplifier
SR830
Stanford Research Systems
Measuring photocurrent
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Si photodetector
SM05PD1A-CAL-SP
Thorlabs
Measuring incident light intensity
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ZEP520A
ZEON CORPORATION
E-beam resist for lithography
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anisole
Sigma Aldrich
Solvent for e-beam resist
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Removal PG
MicroChem
Resist etchant
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Shipley 1822
MicroChem
Optical photoresist
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MF-319
MicroChem
Developer for photoresist
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Keithley 2400
Keithley
Source meter for I-V sweeps
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Xe lamp
66004
Oriel
Light source for optical characterization
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monochromator
CM110
Spectral Products
Tuning incident light wavelength
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