研究目的
To develop a graphene-covered hybrid plasmonic waveguide with strong light-graphene interaction for next-generation silicon photonic modulators that are smaller, faster, and easier to fabricate.
研究成果
The MISIM waveguide covered with solid-electrolyte-gated graphene demonstrates a remarkably large modulation depth of 0.276 dB/μm, indicating strong light-graphene interaction. This work lays the foundation for developing graphene-based silicon photonic modulators with superior performance compared to existing technologies.
研究不足
The modulation speed is limited by the inherently slow response of solid-electrolyte gating. The fabrication process may introduce nonuniform distribution of graphene residues or inhomogeneity, affecting device performance.
1:Experimental Design and Method Selection:
The study involves the design and realization of a metal-insulator-silicon-insulator-metal (MISIM) waveguide covered with graphene and solid electrolyte. The waveguide's performance is evaluated through DC characteristics and modulation characteristics measurements.
2:Sample Selection and Data Sources:
The MISIM waveguide is fabricated using standard CMOS technology on an 8-inch silicon-on-insulator wafer. Graphene is wet-transferred onto the chip, and solid electrolyte is applied for gating.
3:List of Experimental Equipment and Materials:
The fabrication involves optical lithography, reactive-ion etching, chemical vapor deposition, sputtering, and chemical-mechanical polishing. Graphene is grown by chemical vapor deposition and transferred using poly(methyl methacrylate).
4:Experimental Procedures and Operational Workflow:
The waveguide's propagation loss and coupler loss are measured as functions of applied voltage. Modulation characteristics are observed by applying sinusoidal and square wave voltage signals.
5:Data Analysis Methods:
The propagation loss and modulation depth are calculated and compared with theoretical values. The electro-optic S21 parameter is determined to analyze the modulation speed.
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