研究目的
Enhancing the electrochemical (EC) activity of the indium-tin-oxide (ITO) coated optical fiber sensor by tuning ITO magnetron sputtering deposition parameters for combined optical and EC sensing applications.
研究成果
The study demonstrated that optimizing ITO deposition parameters, particularly pressure, can significantly enhance the electrochemical activity of ITO-coated optical fiber sensors while maintaining their optical performance. This enables the development of fully functional combined optical and EC sensors based on lossy-mode resonance, offering new possibilities for label-free sensing applications.
研究不足
The study was limited by the need to balance optical and electrochemical properties of ITO films, which may require further optimization for specific applications. The impact of deposition parameters on film properties and sensor performance was the main focus, with potential areas for optimization identified.
1:Experimental Design and Method Selection:
The study focused on tuning ITO magnetron sputtering deposition parameters, particularly the deposition pressure, to enhance the EC activity of ITO-coated optical fiber sensors.
2:Sample Selection and Data Sources:
ITO films were deposited on optical fiber cores and reference Si wafers under varying deposition pressures.
3:List of Experimental Equipment and Materials:
Equipment included a magnetron sputtering system, optical fiber sensors, reference Si wafers, and electrochemical measurement setups. Materials included ITO target, Ar gas, KCl, K3[Fe(CN)6], and 1,1′-Ferrocenedimethanol.
4:Experimental Procedures and Operational Workflow:
ITO films were deposited at varying pressures, characterized by XRD, ellipsometry, and SEM, and tested for optical and EC performance.
5:Data Analysis Methods:
Optical and EC responses were analyzed to determine the influence of deposition parameters on sensor performance.
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