研究目的
To fabricate ridge optical waveguides onto thin films of PLZT by femtosecond laser ablation and study the characteristics of ablation threshold for different kinematic conditions of fs laser machining, explore the different ablation regimens for several fluences reached, and characterize the morphology and roughness of ridge waveguides.
研究成果
The study presented a model about the micromachining of ridge optical waveguides on PLZT thin films by femtosecond laser ablation. It investigated the relationship between machining parameters and morphology of ablated grooves to reduce the roughness of sidewalls. The waveguides made with multiple scans managed to reduce the scattering losses and showed an improvement in their geometrical morphology.
研究不足
The main disadvantage of femtosecond laser micromachining is the low production capacity since it is directly connected to the pulse repetition rate and the scan velocity. The roughness of the ablated grooves introduces considerable losses and degrades the waveguide quality.
1:Experimental Design and Method Selection:
The study involved fabricating ridge optical waveguides on PLZT thin films using femtosecond laser ablation. The ablation threshold for different kinematic conditions and the ablation regimens for several fluences were studied to achieve smooth structures.
2:Sample Selection and Data Sources:
Pb0.91La0.09Zr0.65Ti0.35O3 thin films with a thickness of around 500 nm were prepared by the chemical solution deposition technique on SiO2/Si substrates.
3:91La09Zr65Ti35O3 thin films with a thickness of around 500 nm were prepared by the chemical solution deposition technique on SiO2/Si substrates. List of Experimental Equipment and Materials:
3. List of Experimental Equipment and Materials: A commercial Ti:sapphire ultrafast laser system (Spectra Physics Spitfire) working at 793 nm, a 10x microscope objective, a micrometer motorized station system (Newport, Inc), a HR2000+ spectrometer (OceanOptics, Inc.), a scanning electron microscope system (Quanta 200, Thermo Fisher Scientific), and a Thorlabs BC106N-VIS beam profiler analyzer were used.
4:Experimental Procedures and Operational Workflow:
The pulse energy was adjusted combining a half-wave plate plus a Glan polarizer and a neutral density filter. The laser was focused on the sample surface, and the morphology and roughness of ridge waveguides were characterized.
5:Data Analysis Methods:
The roughness measurement was obtained by an image post-processing of the top edge of the grooves. The spatial intensity distribution of modes was measured with a beam profiler analyzer.
独家科研数据包,助您复现前沿成果,加速创新突破
获取完整内容-
Spectrometer
HR2000+
OceanOptics, Inc.
Used to capture the plasma emission during the laser ablation.
-
Scanning electron microscope system
Quanta 200
Thermo Fisher Scientific
Used to analyze the morphology and roughness of the ablated grooves.
暂无现货
预约到货通知
-
Beam profiler analyzer
Thorlabs BC106N-VIS
Thorlabs
Used to measure the spatial intensity distribution of modes at the output of the waveguides.
暂无现货
预约到货通知
-
Ti:sapphire ultrafast laser system
Spectra Physics Spitfire
Spectra Physics
Used for femtosecond laser ablation on PLZT thin films.
暂无现货
预约到货通知
-
Microscope objective
10x (NA = 0.25)
Used to focus the laser on the sample surface.
暂无现货
预约到货通知
-
Micrometer motorized station system
Newport, Inc
Used for precise movement of the sample during laser ablation.
暂无现货
预约到货通知
-
登录查看剩余4件设备及参数对照表
查看全部