研究目的
Investigating the capability of dynamic nanoinscribing (DNI) to create tailored nanopatterns with tunable shape, depth, and dimension on various flexible substrates for diverse applications.
研究成果
DNI enables facile and high-throughput nanopatterning on various flexible substrates with tunable depth, shape, and dimension, by controlling several prime parameters including inscribing force, temperature, and substrate feed rate. The specific nanopattern profile is determined by the force-driven plastic deformation as well as the heat-driven thermal deformation, rendering its final shape rounded or angular. More complex nanopatterns with gradient depths and/or multidimensional profiles can also be readily created by modulating the horizontal tool alignment and/or combining sequential inscribing strokes.
研究不足
The critical resolution limit achievable by the DNI process using a rectangular ~1:1 duty grating mold may approximate to ~50 nm period and ~1:1 aspect ratio. The processing speed can be increased especially for softer thermoplastic substrate materials, but can be practically upper-bounded to 1 m/min to allow faithful pattern deformation and stable instrumentation.
1:Experimental Design and Method Selection:
The study utilizes controlled dynamic nanoinscribing (DNI) to generate bur-free plastic deformation on various flexible substrates. The methodology involves continuous mechanical inscription of a small sliced edge of a nanopatterned mold in a compact and vacuum-free system.
2:Sample Selection and Data Sources:
Various commercial polymers including polycarbonate (PC), polyethylene terephthalate (PET), perfluoroalkoxy alkane (PFA), and polyimide (PI) were used as substrates.
3:List of Experimental Equipment and Materials:
A rigid nanograting mold cleaved along the direction perpendicular to the grating pattern, fixed to the mold arm, and set to the desired inscription angle and temperature. The system includes a temperature-controllable mold arm module, a substrate feed module, and a force control module.
4:Experimental Procedures and Operational Workflow:
The substrate is continuously inscribed as conveyed horizontally at the desired feed rate. The inscribing force, temperature, and substrate feed rate are systematically controlled to determine the nanopattern depths and their specific profiles.
5:Data Analysis Methods:
Scanning electron microscopy (SEM) imaging was performed to characterize the nanopatterns. The as-taken SEM images were analyzed using an image processing software for accurate and quantitative measurements of nanopattern profiles.
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