研究目的
To demonstrate the fabrication of macro-scale 3D glass objects with micro-scale feature sizes using femtosecond laser-induced chemical etching (FLICE).
研究成果
The study demonstrated 3D laser printing of glass-based macro-scale objects with heights up to ~3.8 cm at a feature size of a few tens of micrometers. The novel 3D glass printing technique is based on depth-independent focusing and the elimination of the self-organized nanograting, offering potential for manufacturing precision instruments, tools, and machines in various research and application fields.
研究不足
The high-NA focal systems are inherent in short working distances, limiting the depth of the focal position in the glass to a few millimeters. The physical limit in choosing a small slice thickness for printing large 3D structures in thick fused silica can lead to stress buildup and multiple cracks.
1：Experimental Design and Method Selection:
The study utilized a Yb:KGW femtosecond laser for generating short pulses at a 1030 nm wavelength, with the pulse duration tunable from 0.19 to 10 ps. The laser was focused into a fused silica sample using a 5× objective lens with a numerical aperture (NA) of 0.14. The setup included an acousto-optical modulator (AOM) for controlling the laser power and a 1D stage for translating the objective lens along the Z direction to control the depth of the focus position in the glass.
2：19 to 10 ps. The laser was focused into a fused silica sample using a 5× objective lens with a numerical aperture (NA) of The setup included an acousto-optical modulator (AOM) for controlling the laser power and a 1D stage for translating the objective lens along the Z direction to control the depth of the focus position in the glass. Sample Selection and Data Sources:
2. Sample Selection and Data Sources: A 55 mm-thick cube of fused silica was used as the sample. The models for 3D glass micro-printing were generated as stereolithography (STL) files, which were then sliced into horizontal planes with a fixed slice thickness.
3：List of Experimental Equipment and Materials:
The equipment included a Yb:KGW femtosecond laser (Pharos PH1-SP, Light Conversion), an acousto-optical modulator (AOM), a 5× objective lens (M Plan Apo NIR, Mitutoyo Corporation), and motion stages (ANT130-110-L-ZS, ABL15020WB, and ABL15020, Aerotech Inc.). The materials included fused silica and potassium hydroxide (KOH) for wet etching.
4：Experimental Procedures and Operational Workflow:
The laser focal spot was scanned in the sliced planes along pre-designed paths layer by layer to produce the 3D structures. The scan process was performed from the bottom to the top of the glass. After laser irradiation, the samples were polished and then immersed in a KOH solution for wet etching.
5：Data Analysis Methods:
The cross-sectional micrographs of the inscribed lines and hollow channels were analyzed to determine the fabrication feature sizes.
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Yb:KGW femtosecond laser
Pharos PH1-SP
Light Conversion
Generating short pulses at a 1030 nm wavelength for laser microfabrication.
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acousto-optical modulator
AOM
Controlling the laser power and acting as a fast shutter.
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objective lens
M Plan Apo NIR
Mitutoyo Corporation
Focusing the laser beam into the sample.
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1D stage
ANT130-110-L-ZS
Aerotech Inc.
Translating the objective lens along the Z direction to control the depth of the focus position in the glass.
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XY motion stage
ABL15020WB and ABL15020
Aerotech Inc.
Controlling the lateral motion of the sample.
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machine controller
A3200
Aerotech Inc.
Controlling the translation stages and synchronizing with the AOM.
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