研究目的
To modulate the responsivity of a broad photodetector using porous Si-SiO2 UV microcavities, making the photodetector more selective in the UV range.
研究成果
Porous Si-SiO2 UV filters were successfully used to modulate the responsivity of a commercial photodetector, making it more selective in the UV range. The filters' spectral responses were modified by applying different oxidation flows, achieving tunability in the UV range.
研究不足
High chemical instability, high photon losses due to light absorption, and scattering in the visible and UV ranges. Solutions include dry oxidation in PS structures.
1:Experimental Design and Method Selection:
Fabrication of PS microcavities filters using p-type Si wafers, anodically etched in an aqueous electrolyte based in HF and ethanol. Dry oxidation in PS microcavities filters was performed in two stages.
2:Sample Selection and Data Sources:
Commercial photodetector GVGR-T10GD with a detection range from 300 to 510 nm.
3:List of Experimental Equipment and Materials:
Keithley 2460 current source, Varian (Agilent Technologies) UV-Vis-NIR spectrophotometer, JEOL-JSM7600F SEM, optical chopper SR540, Xenon lamp 6254, monochromator, lens, Keithley 2460 source, Look-in amplifier SR-
4:Experimental Procedures and Operational Workflow:
5 Fabrication of PS microcavities, dry oxidation, transmittance and reflectance spectra measurements, photocurrent modulation by porous Si-SiO2 microcavities filters.
5:Data Analysis Methods:
Transfer matrix technique and variational methods for theoretical spectra fitting.
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Look-in amplifier SR-530
SR-530
Stanford Research Systems
Amplifying the photodetector photocurrent.
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Keithley 2460
2460
Keithley
Current source controlled by a laptop for delivering a current profile for the microcavities formation.
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JEOL-JSM7600F
JSM7600F
Jeol
Obtaining cross-section SEM images of an oxidized microcavity.
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GVGR-T10GD
GVGR-T10GD
Electro Optical Components Inc.
Commercial photodetector based in indium gallium nitride with a spectral detection range from 300 to 510 nm.
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Varian UV-Vis-NIR spectrophotometer
Agilent Technologies
Transmittance and reflectance spectra measurements at normal incidence.
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Optical chopper SR540
SR540
Stanford Research Systems Inc.
Cutting off the light coming from the Xenon lamp.
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Xenon lamp 6254
6254
Oriel Corporation
Light source concentrated at the input of a monochromator.
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