研究目的
To report on a photodetector equipped with gold grating structures on a tilting-angle micro electro mechanical system (MEMS) cantilever to reconfigure plasmonic photodetection characteristics, and experimentally demonstrated spectroscopic measurement using the reconfigurable plasmonic photodetector.
研究成果
The proposed device achieved SPR coupling reconfiguration of the plasmonic photodetector. The reconfiguration provided angular SPR-induced photocurrent waveforms, and it was possible to confirm the peak shifts of the photocurrent signal depending on an incident wavelength, which is consistent with SPR theory. The demonstration presents availability of the reconfigurable plasmonic photodetector for spectroscopy and polarization-specific measurement.
研究不足
The waveform distortion might originate from transient phenomena, which can be attributed to the response time of the peripheral circuit and an inductance or a capacitance factor among the device. These problems can be eliminated by optimizing the peripheral circuit or the plasmonic structure on the cantilever.
1：Experimental Design and Method Selection:
The study involved designing a MEMS reconfigurable plasmonic photodetector with a gold diffraction grating fabricated on an n-type silicon cantilever. The device was designed to reconfigure SPR coupling conditions by tilting the cantilever to change the incident angle of light.
2：Sample Selection and Data Sources:
The device was fabricated using a silicon on insulator (SOI) wafer. Monochromatic near-infrared light from a light source was used to investigate the SPR behavior.
3：List of Experimental Equipment and Materials:
Equipment included a light source (SC450-2, FIANIUM, UK), a power meter (PM320E-S122C, Thorlabs, USA), a laser Doppler vibrometer (MLD-221D, Neoarc Corp., Japan), and a speaker (FF125K, FW208N, FOSTEX, Japan) for cantilever tilting.
4：Experimental Procedures and Operational Workflow:
The device was attached to a rotation stage to measure photocurrent signals by scanning the angle of incidence. The cantilever's tilting angle amplitude was measured using a visible light laser and a screen.
5：Data Analysis Methods:
The photocurrent signals were analyzed to determine SPR coupling conditions and the device's ability to detect SPR electrically.
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