研究目的
Investigating a unique plasmonic waveguide architecture that alleviates the loss-confinement trade-off and improves the efficiencies of plasmonic-based emission, light-matter-interaction, and detection simultaneously.
研究成果
The study demonstrates a plasmonic waveguide architecture that alleviates the plasmonic loss-confinement trade-off and is capable of utilizing multiple device physics to enable multiple functionalities. The amorphous-based devices showed record Purcell factor for plasmonic microrings, record quantum efficiency and sensitivity for guided-wave Schottky detectors, and record ER-IL ratio for plasmonic modulators based on ENZ effect.
研究不足
The energy efficiency of the CHPW modulators is limited by the properties of the MOS oxide layer. The use of high-κ oxide, such as HfO2, deposited via atomic layer deposition is suggested to enable CMOS-compatible driving voltage.
1：Experimental Design and Method Selection:
The study involves the design and fabrication of a coupled hybrid plasmonic waveguide (CHPW) that combines the advantages of coupled and hybrid plasmonic waveguide modes to achieve long-range propagation and nanoscale modal confinement.
2：Sample Selection and Data Sources:
The devices are fabricated on a single chip using identical material stack (α-Si/Al/SiO2/Si) and layer thicknesses, with an additional 10 nm ITO layer for modulators.
3：List of Experimental Equipment and Materials:
AJA International ATC Orion 8 Sputter Deposition System, Angstrom Nexdep electron beam evaporator, Vistec EBPG 5000+ electron beam lithography system, Oxford Instruments PlasmaPro Estrelas 100 DRIE system, Trion Minilock II ICP-RIE System.
4：Experimental Procedures and Operational Workflow:
Multiple lithography steps were required to define the CHPW devices, followed by etching and sputtering processes to create the waveguide stack and electrical contacts.
5：Data Analysis Methods:
The performance of CHPW components was characterized using scanning electron microscopy, cut-back measurement, and optoelectronic bandwidth measurement.
独家科研数据包，助您复现前沿成果，加速创新突破
获取完整内容
