研究目的
Investigating the characteristics of laser induced discharge tin plasma and its extreme ultraviolet radiation.
研究成果
The study successfully established a CO2 laser induced discharge plasma EUV source experimental device and analyzed the plasma characteristics. Higher discharge voltages resulted in increased EUV spectral intensity and conversion efficiency. However, improvements in plasma concentration and current rising rate are needed for higher EUV CE and energy utilization.
研究不足
The current rising rate was a bit slow and the plasma was not concentrated effectively, leading to not high enough EUV CE and energy utilization.
1：Experimental Design and Method Selection:
A CO2 laser induced discharge plasma EUV source experimental device was established. Optical emission spectroscopy was used to diagnose the plasma characteristics.
2：Sample Selection and Data Sources:
Solid tin was used as the target material. The visible spectra and EUV spectra were collected under different discharge voltages.
3：List of Experimental Equipment and Materials:
CO2 laser, high voltage probe (Tektronix P6015A), current monitor (Pearson 4997), visible spectrometer (Acton, SpectraPro-2750), ICCD camera (Princeton Instrument, PI-MAX-1300), EUV spectrometer with X-ray CCD camera (Princeton Instruments-SX:400).
4：0).
Experimental Procedures and Operational Workflow:
4. Experimental Procedures and Operational Workflow: The laser was focused on the cathode surface to produce initial plasma, causing breakdown between two electrodes. The voltage and current were measured, and spectra were collected at different times during the discharge.
5：Data Analysis Methods:
Electron temperature was estimated using the Boltzmann plot method, and electron density was calculated using the Stark broadening method. EUV radiation intensity and conversion efficiency were analyzed.
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