摘要： Laser induced periodic surface structures (LIPSS) represent a kind of top down approach to produce highly reproducible nano/microstructures without going for any sophisticated process of lithography. This method is much simpler and cost effective. In this work, LIPSS on Si surfaces were generated using femtosecond laser pulses of 800 nm wavelength. Photocatalytic substrates were prepared by depositing TiO2 thin films on top of the structured and unstructured Si wafer. The coatings were produced by sputtering from a Ti target in two different types of oxygen atmospheres. In first case, the oxygen pressure within the sputtering chamber was chosen to be high (3 × 10–2 mbar) whereas it was one order of magnitude lower in second case (2.1 × 10–3 mbar). In photocatalytic dye decomposition study of Methylene blue dye it was found that in the presence of LIPSS the activity can be enhanced by 2.1 and 3.3 times with high pressure and low pressure grown TiO2 thin films, respectively. The increase in photocatalytic activity is attributed to the enlargement of effective surface area. In comparative study, the dye decomposition rates of TiO2 thin films grown on LIPSS are found to be much higher than the value for standard reference thin film material Pilkington ActivTM.