研究目的
To develop a maskless laser nano-lithographic technique for high-quality two-dimensional periodic nanodomes fabrication on glass using femtosecond laser processing.
研究成果
The study successfully demonstrates a maskless laser nano-lithographic technique for fabricating high-quality two-dimensional periodic nanodomes on glass. The use of a copper film with a larger g factor improves the structural quality and uniformity. A single-fluence process is introduced, simplifying the fabrication procedure. The technique has potential applications in antireflection, high-performance optics, solar cells, and low-loss metamaterials.
研究不足
The technique requires precise control of laser fluence and pulse number. The quality of nanostructures may vary with the type of metal coating and laser parameters.
1:Experimental Design and Method Selection:
The study utilizes circularly polarized femtosecond laser pulses to process a glass sample coated with a thin copper film. The laser beam is incident normally and focused onto the sample surface. The fluence and pulse number are tunable to control the fabrication process.
2:Sample Selection and Data Sources:
A glass slide coated with a 100 nm thick copper film is used. The fluence thresholds for damaging the Cu film and for drilling a hole on the glass substrate are determined.
3:List of Experimental Equipment and Materials:
A Ti:Sapphire laser system (center wavelength: 790 nm, pulse duration: 62 fs, repetition rate: 1 kHz), a lens (focal length f = 250 mm), and a physical vapor deposition system for copper film coating.
4:Experimental Procedures and Operational Workflow:
The sample is irradiated with laser pulses with varying fluences and pulse numbers. The surface structures are observed using a scanning electron microscope after exposure.
5:Data Analysis Methods:
The structural quality and uniformity are analyzed through SEM images, particle area distribution, and 2D Fourier transform.
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