研究目的
Investigating the use of Sb2Te3 thin film in developing high performance broadband photodetectors.
研究成果
The Sb2Te3 thin film prepared by magnetron sputtering and rapid annealing demonstrated excellent crystallinity and broad absorption range, making it suitable for high-performance broadband photodetectors. The prototype device showed significant photoelectric response across a broad spectral range with high responsivity and detectivity.
研究不足
The study does not deeply explore the selective growth of lattice planes depending on sputtering power. The presence of a thin oxide layer on the Sb2Te3 film surface was noted but not extensively analyzed.
1:Experimental Design and Method Selection:
The study involved the preparation of Sb2Te3 thin films using magnetron sputtering followed by rapid annealing to improve crystallinity. A prototype photodetector based on Sb2Te3/n-Si heterostructure was fabricated and characterized.
2:Sample Selection and Data Sources:
n-Si substrate was used for depositing Sb2Te3 film. The film's properties were analyzed using various techniques including XRD, TEM, AFM, and XPS.
3:List of Experimental Equipment and Materials:
Magnetron sputtering system, Sb2Te3 target, n-Si substrate, AFM, TEM, XRD, XPS, UV-Vis absorption spectrometer.
4:Experimental Procedures and Operational Workflow:
The Sb2Te3 film was deposited on n-Si substrate by magnetron sputtering, followed by rapid annealing. The film's structural, optical, and electrical properties were then characterized.
5:Data Analysis Methods:
The optical band gap was calculated using UV-Vis absorption spectra. The photodetector's performance was evaluated based on responsivity and detectivity calculations.
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Magnetron sputtering system
Used for depositing Sb2Te3 thin films on n-Si substrate.
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Sb2Te3 target
Source material for sputtering to produce Sb2Te3 thin films.
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AFM
Used for measuring the thickness and surface roughness of the Sb2Te3 film.
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TEM
Used for investigating the crystallinity and microstructure of the Sb2Te3 film.
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XRD
Used for analyzing the crystallinity and phase of the Sb2Te3 film.
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XPS
Used for elemental composition analysis of the Sb2Te3 film.
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UV-Vis absorption spectrometer
Used for studying the optical properties of the Sb2Te3 film.
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