研究目的
To introduce the latest developments of optical constants on the classification of DLC films and explore their relationship with the current standard.
研究成果
The study concludes that SE, combined with BEMA theory, is effective for the structural analysis of DLC films, especially for those with low hydrogen content. Optical constants (n and k) obtained from SE can be a practical tool for classifying DLC films, with Ek and En-max showing exponential dependencies on hydrogen contents. The method offers a simplified approach to DLC film classification without relying on large-scale analysis equipment.
研究不足
The study acknowledges the discrepancies in sp3/(sp3 + sp2) ratios between BEMA and NEXAFS methods for high-hydrogen content films and the need for a large database to establish a straightforward classification method. The boundary between PLC and a-C:H films remains controversial.