研究目的
To establish the instrumental conditions for the grid sharpness in structured-illumination Makyoh-topography and analyze the two main types of Makyoh set-ups (lens and mirror based) for their ability to maintain grid sharpness.
研究成果
Lens-based set-ups allow for the grid to be positioned sharply on the Makyoh image, facilitating simultaneous observation of the sample morphology. Mirror-based set-ups, however, cannot achieve this due to geometrical instrumental constraints.
研究不足
The study is limited by the simplified model used, which assumes ideal conditions such as a point source, monochromatic illumination, and a flat sample. The practical applicability of the findings may be constrained by these idealizations.
1：Experimental Design and Method Selection:
The study employs a simple model with ideal point source, monochromatic illumination, flat sample, and simplified grid geometry to analyze the grid's image sharpness.
2：Sample Selection and Data Sources:
A 2-inch Si wafer with a backside scratch, some global deformation, and other localized morphological features is used as a test sample.
3：List of Experimental Equipment and Materials:
A lens-based set-up with a 500 mm focal-length converging lens and an 820-nm pigtailed LED, and a mirror-based set-up with two
4：4 mm focal-length spherical mirrors and a yellow chip LED (592 nm). A grid formed by photolithography on a flat glass substrate with a 2 mm pitch and 200 μm line width is used. Experimental Procedures and Operational Workflow:
9 The grid's position is adjusted to achieve sharpness in the Makyoh image, and the effects of diffraction are observed.
5：Data Analysis Methods:
The sharpness of the grid's image is assessed based on the visibility of morphological features in the Makyoh image.
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