研究目的
Investigating the nanostructure formation and phase separation in Zr1?xAlxN films under high mobility growth conditions to understand the mechanisms of self-organization and its impact on mechanical properties.
研究成果
The study demonstrates that Zr1?xAlxN films can form highly ordered nanolabyrinthine structures through non-isostructural decomposition, leading to enhanced mechanical properties. The findings provide insights into the design of hard coatings with tailored properties.
研究不足
The study is limited to the specific conditions of magnetron sputtering and may not directly apply to other deposition methods. The analysis of nanostructure formation is complex and may require further theoretical and experimental validation.
1：Experimental Design and Method Selection:
High-temperature magnetron sputter thin film synthesis was employed to study the nanostructure formation in Zr1?xAlxN films.
2：Sample Selection and Data Sources:
Films were deposited on MgO (001), MgO (111), and polished polycrystalline WC + Co substrates.
3：List of Experimental Equipment and Materials:
A high vacuum dc unbalanced magnetron sputtering system was used with Zr and Al targets.
4：Experimental Procedures and Operational Workflow:
Films were deposited at varying substrate temperatures and compositions, followed by structural and chemical analysis.
5：Data Analysis Methods:
Structural analysis was performed using XRD, TEM, and XPS, while mechanical properties were assessed via nanoindentation.
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