摘要： Employing atomic force microscopy, transmission electron microscopy and the second harmonic generation technique, we carefully explore the structural properties of 6-unit-cell-thick La0.8Sr0.2MnO3 films grown on SrTiO3 with atomically flat TiO2-terminated terraces on the surface. The results clearly demonstrate that the terraces on the surface of TiO2-terminated SrTiO3 can improve the layer-by-layer epitaxial growth of the manganite films, which results in uniform film coverage at the beginning of growth and thus reduces the substrate-induced disorder at or near the interface. Comparing the magnetic and transport properties of La0.8Sr0.2MnO3 films with the thicknesses varying from 6 unit cells to 80 unit cells grown respectively on as-received SrTiO3 and TiO2-terminated SrTiO3, it is found that these atomically flat terraces on the surface of TiO2-terminated SrTiO3 can greatly enhance the Curie temperature and conductivities of the ultrathin La0.8Sr0.2MnO3 films with thickness less than 50 unit cells, while no obvious difference is detected in the magnetic and transport properties of the 80 unit-cell thick films.