研究目的
Investigating the catalytic growth of large area monolayer molybdenum disulfide (MoS2) film by chemical vapor deposition using perylene-3, 4, 9, 10-tetracarboxylic acid tetrapotassium salt (PTAS) as a catalyst.
研究成果
The study successfully synthesized large area monolayer MoS2 film by CVD with PTAS as catalyst, demonstrating that PTAS plays a crucial role in promoting the horizontal growth of MoS2 into a continuous and uniform film. The findings pave the way for future device applications of monolayer MoS2.
研究不足
The study focuses on the growth of MoS2 films using PTAS as a catalyst, and the comparison is made with films grown without PTAS under the same conditions. The potential for optimization in the growth process and the scalability of the method are areas for future research.
1：Experimental Design and Method Selection:
The MoS2 film was grown on SiO2/Si substrate by CVD, with molybdenum trioxide (MoO3) and sulfur (S) powders as precursors. PTAS was used as a catalyst.
2：Sample Selection and Data Sources:
The SiO2/Si substrate was spin coated with PTAS solution before CVD growth.
3：List of Experimental Equipment and Materials:
MoO3 (
4：95 %, Sigma-Aldrich), S (98 %, Sigma-Aldrich), PTAS solution, WITec alpha300 optical imaging and AFM system, WITec alpha300 confocal Raman microscope system, Rigaku Smartlab high resolution diffraction system. Experimental Procedures and Operational Workflow:
The substrate was put upside down at the top of the quartz boat of the MoO3 powders, which was 20 cm away from the quart boat of S powders. N2 with 40 sccm flow rate was flown from the S powder to the MoO
5：The temperature of MoO3 and S powders was increased from room temperature to 840 ℃ and 300 ℃ in 54 minutes, respectively. The growth time was 5 min. Data Analysis Methods:
The samples were characterized using optical microscope (OM) imaging, atomic force microscope (AFM), Raman spectroscopy, photoluminescence (PL) spectroscopy and PL mapping, and x-ray diffraction (XRD).
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