研究目的
To develop a CMUTs-based resonant biochemical sensor for detecting SO2 with high sensitivity and accuracy using electrospinning technology.
研究成果
The CMUTs-based resonant biochemical sensor demonstrated high volume sensitivity (120 ppb/Hz) and frequency stability (0.025% average frequency instability) for SO2 detection. The use of electrospinning technology for functionalization proved to be an innovative and effective method.
研究不足
The study focuses on SO2 detection and may require further research to adapt the sensor for other gases. The electrospinning technology, while effective, may need optimization for mass production.
1：Experimental Design and Method Selection
The study utilized CMUTs with a working resonant frequency of 1.756 MHz for SO2 detection. Ethylenedinitrilotetraethanol (EDT) was used as the sensitive material, functionalized using electrospinning technology to fabricate nano reticular polymer fibers on the CMUTs.
2：Sample Selection and Data Sources
The experiments involved detecting SO2 concentrations in a controlled environment using a dynamic gas testing system.
3：List of Experimental Equipment and Materials
CMUTs chip, EDT, polyethylene oxide (PEO), impedance analyzer (Agilent Technologies, Model E4990A, USA), SEM (Hitachi, SU-8010, Japan), LSCM (Olympus, OLS4000, Japan).
4：Experimental Procedures and Operational Workflow
The CMUTs were functionalized with EDT using electrospinning technology. The sensor was then exposed to varying concentrations of SO2, and the resonant frequency shifts were recorded.
5：Data Analysis Methods
The resonant frequency shifts were analyzed to determine the sensor's sensitivity and stability. A 4-element Butterworth-van Dyke equivalent circuit model was used to describe the electrical characteristics of the functionalized CMUTs.
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