摘要： Highly bismuth-substituted iron garnet thin films are prepared on quartz substrates by using a radio frequency (RF) magnetron sputtering technique. We study the factors (process parameters associated with the RF magnetron sputter deposition technique) affecting the magneto-optical (MO) properties of ferrite garnet films of composition Bi2.1Dy0.9Fe3.9Ga1.1O12. All ?lms show high MO response across the visible range of wavelengths after being annealed. In particular, the effects of substrate stage temperature and rotation rate on the various properties of ?lms are studied. Experimental results reveal that the characteristics of garnet ?lms of this type can be tuned and optimized for use in various magnetic ?eld-driven nanophotonics and integrated optics devices, and that, at a substrate stage rotation rate near 16 revolutions per minute, the MO quality of the developed MO ?lms is the best, in comparison with ?lms deposited at other rotation rates. To the best of our knowledge, this is the ?rst report on the effects of deposition parameters on the properties of garnet ?lms of this stoichiometry.