研究目的
Investigating the highly stable, high performance E/S a-IGZO TFT on plastic substrate for flexible and bendable AMOLED displays.
研究成果
The split E/S a-IGZO TFTs exhibit excellent device performance, bias and mechanical stabilities, making them suitable for high resolution flexible AMOLED displays. The improvement in top interface by metal-F bonds formed by F plasma for E/S patterning and subsequent reduction in the interface state density contributes to these results.
研究不足
The study is limited to the evaluation of a-IGZO TFTs on PI substrate and does not explore other materials or substrates. The mechanical stability tests are conducted under specific conditions (radius R = 2 mm, strain = 0.7 %).
1：Experimental Design and Method Selection:
The study focuses on the fabrication and evaluation of a-IGZO TFTs with split active layer and source/drain electrodes on polyimide (PI) substrate.
2：Sample Selection and Data Sources:
The samples are a-IGZO TFTs fabricated on PI substrate with etch stopper (E/S) structure.
3：List of Experimental Equipment and Materials:
Polyimide (PI) substrate, a-IGZO material, etch stopper (E/S) structure.
4：Experimental Procedures and Operational Workflow:
Fabrication of inverted staggered a-IGZO TFTs with E/S structures, evaluation of device performance under bias-stress and mechanical stress.
5：Data Analysis Methods:
Comparison of transfer and output characteristics of TFTs with standard (STD) and split structures, evaluation of device stability under high current temperature stress (HCTS) and mechanical bending.
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