研究目的
To investigate the effect of the geometric characteristics of the adhesion layer on the surface plasmon resonance spectrum and the mechanical strength of the mold, and to apply SPR measurements to estimate the filling rate of the mold cavity in NIL.
研究成果
The study demonstrated the effectiveness of the highly sensitive proposed SPR measurement method for estimating the ?lling rate of the mold cavity in NIL. The fabricated mold was sufficiently strong for heating and pressure application, and the experimental results confirmed that the proposed method can be used to estimate the filling rate of the mold cavity in NIL.
研究不足
The study suggests reducing the thickness of the Ti adhesion layer to below 6 nm and maintaining the surface roughness below 3 nm to maintain the sharpness of the resonance dip. These requirements may limit the applicability of the method in some cases.
1：Experimental Design and Method Selection:
The study employed analytical and experimental investigations to understand the influence of the mold geometry and morphology on the SPR spectrum. PC Grate software was used for simulation calculations.
2：Sample Selection and Data Sources:
The mold structure included a high refractive index layer of glass, a metal layer, and a low refractive index pattern layer. The effect of the geometric characteristics of the adhesion layer on the SPR spectrum was studied.
3：List of Experimental Equipment and Materials:
The mold fabrication process involved semiconductor processes, including electron-beam lithography and reactive ion etching. An atomic force microscope (AFM) and a transmission electron microscope (TEM) were used for observation.
4：Experimental Procedures and Operational Workflow:
The fabrication process included polishing the SF11 substrate, cleaning, depositing Ti and Au layers, defining the mold pattern, and transferring the pattern to the SiO2 layer.
5：Data Analysis Methods:
The re?ectivity spectrum was measured to estimate the ?lling rate, and the change in the SPR spectrum curve and resonance angle was analyzed to indicate the quality of the imprinted pattern.
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