研究目的
To achieve band engineering of anatase TiO2 through the synthesis of an anatase (TiO2)1?x(TaON)x (TTON) solid solution and investigate its properties for potential applications in photocatalysis and optoelectronics.
研究成果
The study successfully synthesized anatase TTON epitaxial thin films with a complete solid solution, demonstrating systematic control over bandgap, band alignment, and refractive index. The findings suggest that anatase TTON is suitable for photocatalytic water splitting and optoelectronics applications due to its tunable properties.
研究不足
The study acknowledges the experimental error in nitrogen content evaluation due to the instability of the proton beam energy in nuclear reaction analysis. Additionally, the overestimation of the bandgap in TiO2-rich films due to a Burstein-Moss shift caused by carrier electrons is noted as a limitation.
1：Experimental Design and Method Selection:
The study utilized nitrogen plasma-assisted pulsed laser deposition (NPA-PLD) to synthesize epitaxial thin films of TTON on (LaAlO3)
2：3(SrAl5Ta5O3)7 substrates. The method was chosen for its ability to control the deposition rate and substrate temperature precisely. Sample Selection and Data Sources:
The films were grown with various Ti:Ta ratios (x =
3：1, 3, 5, 7, and 9) using ceramic pellets of Ti1?xTaxOy as PLD targets. List of Experimental Equipment and Materials:
Key equipment included a KrF excimer laser for ablation, an infrared lamp heater for substrate temperature control, and a radio-frequency wave plasma source for nitrogen gas activation. Materials included TiO2 and Ta2O5 powders for target preparation.
4：Experimental Procedures and Operational Workflow:
The films were grown under a mixture of O2 and N2 gas, with the partial pressure of O2 gas controlled to optimize film quality. Film thicknesses were evaluated using a stylus profiler.
5：Data Analysis Methods:
Crystal structures were examined by X-ray diffraction and transmission electron microscopy. Optical properties were analyzed using spectroscopic ellipsometry and X-ray photoelectron spectroscopy.
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