研究目的
To describe novel process and characterization techniques in optical fabrication that provide additional insight into the fabrication process, focusing on surface figure, surface quality, surface roughness, and material removal rate.
研究成果
The chapter presents a variety of novel techniques for optical fabrication and characterization that offer deeper insights into the fabrication process. These techniques address key aspects such as surface figure, quality, roughness, and material removal rate, providing tools for engineers and opticians to improve fabrication outcomes. The methods range from process improvements like pad wear management and slurry stabilization to advanced characterization techniques like nanoscratching and taper-wedge measurements for subsurface damage.
研究不足
The techniques described may require specialized equipment and materials not readily available in all optical fabrication settings. Some methods, like the hermetically sealed polishing chamber, may be costly to implement. The effectiveness of certain techniques, such as slurry chemical stabilization, may vary depending on the specific slurry and workpiece materials used.
1：Experimental Design and Method Selection:
The chapter describes various novel techniques for optical fabrication and characterization, including stiff versus compliant blocking, strip etch and bulk etch, pad wear management with septum or conditioner, hermetically sealed high-humidity polishing chamber, engineered filtration system, slurry chemical stabilization, slurry lifetime and slurry recycling, ultrasonic pad cleaning, and several workpiece characterization techniques.
2：Sample Selection and Data Sources:
The techniques are applied to optical workpieces, specifically fused-silica and other optical materials, with data sourced from experimental measurements and literature.
3：List of Experimental Equipment and Materials:
Equipment includes AFM, IR imaging cameras, confocal microscopy, SPOS for PSD measurement, and various polishing and grinding systems. Materials include polishing slurries, pitch, polyurethane pads, and optical workpieces.
4：Experimental Procedures and Operational Workflow:
Detailed procedures for each technique are provided, such as the process for pitch-button blocking (PBB), the use of a septum for pad wear management, and the application of a hermetically sealed chamber for polishing.
5：Data Analysis Methods:
Data analysis includes measuring surface figure changes, roughness via AFM, PSD via SPOS, and temperature distributions via IR imaging.
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