研究目的
Investigating the effect of conditioner types and downforces during pad break-in on the evolution of pad surface micro-texture in Chemical Mechanical Planarization.
研究成果
The study demonstrated the importance of understanding how different conditioner types react to changes in downforce when breaking-in a pad. Most pad surface micro-texture parameters stabilized within the first 30 minutes of pad break-in. The different characteristics of the two discs contribute to two completely different cutting mechanisms, which affects the evolution of the pad surface micro-texture.
研究不足
The study was limited to two types of conditioning discs and a specific range of downforces. The analysis was based on data from 8 stitched images per pad sample, which may introduce some noise in the results.
1：Experimental Design and Method Selection:
The study involved the break-in of five brand new pads with different conditioning discs at different downforces, giving a total of five different experimental conditions. Confocal microscopy was used to analyze the samples for their surface micro-topography and pad-wafer contact.
2：Sample Selection and Data Sources:
Five brand new IC1000 K-grooved pads with Suba IV sub-pad were used. Pad samples were extracted from the center of the wafer track prior to pad break-in as well as after 5, 15, 30 and 60 minutes.
3：List of Experimental Equipment and Materials:
An Araca APD-800 polisher and tribometer was used. Two different diamond conditioning discs (3M A160 and ABT S3410845N) were used.
4：Experimental Procedures and Operational Workflow:
Pad samples were extracted throughout the break-in process. Topographic and contact area images of the pad surface land areas were acquired using a Zeiss 880 LSM laser scanning confocal microscope.
5：Data Analysis Methods:
The resultant images were analyzed for summit height distribution, mean summit height, mean summit curvature, percentage contact area and contact density.
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