研究目的
To further enhance the sensitivity towards Volatile Organic Compounds (VOCs) and to improve the baseline stability at low power consumption, while making the sensor compatible with Application Specific Integrated Circuit (ASIC) features.
研究成果
The novel composite heater design significantly improves the sensitivity towards formaldehyde and baseline stability at a low power consumption of 10.5 mW compared to the initial D02 design. The response and recovery times of the sensors are satisfactory for air quality monitoring applications.
研究不足
The study focuses on the sensitivity towards VOCs and baseline stability at low power consumption. The compatibility with ASIC features is a key consideration, but the study does not explore other potential applications or limitations in different environmental conditions.
1：Experimental Design and Method Selection:
The study involved designing, fabricating, and characterizing SMO gas sensors with a focus on power consumption, thermal distribution, and sensing capability. A novel sensor structure was proposed to enhance baseline stability and sensing response at low power consumption.
2：Sample Selection and Data Sources:
Two sensor designs were analyzed using experimental characterization and simulation.
3：List of Experimental Equipment and Materials:
Tantalum-aluminum (TaAl) was chosen for the microheater material. Pt doped SnO2 thin films were deposited on two different micro-hotplates.
4：Experimental Procedures and Operational Workflow:
The sensors were characterized in a micro-chamber under formaldehyde exposures with controlled humidity and gas flow rate.
5：Data Analysis Methods:
The sensors' performances were assessed using Keithley 2450 SourceMeters at a bias current of 1 μA.
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