研究目的
Designing a micro-hotplate for MEMS based gas sensor with heating and test electrodes on the same plane to optimize fabrication process, heating efficiency, and avoid parasitic electric fields.
研究成果
The designed micro-hotplate with heating and test electrodes on the same plane showed excellent performance in ethanol detection, with a response of 21.4 in 100 ppm ethanol gas. The device's thermal distribution was uniform, and the relation between working temperature and voltage was clarified. Future work will focus on optimizing power consumption.
研究不足
The power consumption of the micro-hotplate needs further optimization for broader application.
1：Experimental Design and Method Selection:
The micro-hotplate was designed with heating and test electrodes on the same plane, optimized using finite element analysis. Platinum was used for both electrodes.
2：Sample Selection and Data Sources:
A 4-inch silicon wafer was used as the substrate.
3：List of Experimental Equipment and Materials:
Electron-beam evaporation for Pt deposition, PECVD for SiO2 insulation layer, and RIE for patterning.
4：Experimental Procedures and Operational Workflow:
Fabrication involved thermal oxidation, photolithography, Pt deposition, lift-off, SiO2 deposition, and RIE.
5：Data Analysis Methods:
Resistance-temperature and voltage-resistance relations were measured, and thermal distribution was observed using infrared thermography microscope.
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