研究目的
Investigating the fabrication and tribological characterization of deformation-resistant nano-textured surfaces produced by two-photon lithography and atomic layer deposition.
研究成果
The combination of two-photon lithography and ALD offers an effective and practical technique for fabricating surfaces with excellent deformation resistance and tribological characteristics. These surfaces are very promising for addressing the tribological issues present in many current M/NEMS devices and for enabling the design and fabrication of new devices with sliding contact.
研究不足
The study is limited by the use of a polymer core in the CSNs, which does not allow for the dislocation mechanisms that enable deformation recovery in metal core CSNs. Additionally, the fabrication process is complex and requires precise control over the ALD coating thickness.
1：Experimental Design and Method Selection:
Ordered arrays of IP-DIP photoresist nanodots were fabricated using two-photon lithography, followed by conformal coating with Al2O3 via atomic layer deposition to form IP-DIP/Al2O3 core-shell nanostructures (CSNs).
2：Sample Selection and Data Sources:
Fused silica substrates were used for fabricating the nanodots and CSNs.
3：List of Experimental Equipment and Materials:
Nanoscribe Photonic Professional GT System for two-photon lithography, Ultratech Savannah 200 for ALD, TriboIndenter for nanoscratch and adhesion experiments, laser scanning confocal microscope (LSCM, VK-X260K, Keyence) for surface topography measurement, and scanning electron microscopy (SEM, Nova NanoLab, FEI) for morphology characterization.
4：Experimental Procedures and Operational Workflow:
Nanoscratch testing with a constant applied normal load was performed to characterize the tribological properties of the surfaces. Adhesion testing was performed using the TriboIndenter in a single-axis, displacement controlled mode.
5：Data Analysis Methods:
The coefficient of friction (COF) was calculated as the average ratio of the lateral force to the normal force over the scratch length. Hertzian contact theory was used to estimate the maximum contact pressure applied to the textured surfaces.
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