研究目的
To develop a scalable and reproducible fabrication method for high-sensitivity optomechanical magnetometers on a silicon chip.
研究成果
The study successfully developed a scalable and reproducible fabrication method for high-sensitivity optomechanical magnetometers on a silicon chip. The peak sensitivity achieved is comparable to previous methods, and thermal annealing of the sputtered film can enhance sensitivity. This work opens up possibilities for applications requiring high sensitivity without cryogenics.
研究不足
The sensitivity is limited by the thermal noise and shot noise from the probe laser. The fabrication process requires precise control to avoid cracking during thermal annealing due to the mismatch in thermal coefficients of Terfenol-D and silica.
1：Experimental Design and Method Selection:
The study involves designing a silica microtoroid with a magnetostrictive material embedded inside, supported by a silicon pedestal. The method includes sputter coating a magnetostrictive film onto high-quality toroidal microresonators without degrading the optical quality factor.
2：Sample Selection and Data Sources:
The samples are fabricated on a silicon wafer with a thermally oxidized silica layer. The magnetostrictive material used is Terfenol-D (Fe2Tb0.3Dy0.7).
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List of Experimental Equipment and Materials:
3. List of Experimental Equipment and Materials: Equipment includes a scanning electron microscope (SEM), a tapered fiber for light coupling, a photoreceiver, an electronic spectrum analyzer (ESA), and a CO2 laser for reflow process. Materials include silicon wafers, silica, Terfenol-D, and gold for protective layers.
4：Experimental Procedures and Operational Workflow:
The fabrication process involves photolithography, HF acid etching, sputter coating, lift-off, XeF2 etch, CO2 laser reflow, and thermal annealing. The magnetic field sensitivity is characterized using a coil to produce a known magnetic field.
5：Data Analysis Methods:
The sensitivity is derived from the signal-to-noise ratio (SNR) obtained from the noise power spectrum measured by the ESA.
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