研究目的
To simulate the process of secondary electrons excitation in resist PMMA using the Monte Carlo method with Mott cross section and dielectric function model, and analyze its characteristics to determine the significance of secondary electrons in electron beam lithography.
研究成果
Secondary electrons are generated predominantly in low-energy regions and in large numbers, significantly affecting the energy loss distribution in PMMA during electron beam lithography. Their inclusion in simulations improves accuracy and credibility of results, despite increased computational demands.
研究不足
The simulation does not account for all physical interactions and may have computational inefficiencies, as including secondary electron excitation increases run time significantly. The optical energy loss function for PMMA above 33 eV is approximated, which may introduce inaccuracies.
1：Experimental Design and Method Selection:
The Monte Carlo method is employed to simulate electron scattering and secondary electron excitation in PMMA resist, utilizing Mott cross section for elastic scattering and dielectric function model for inelastic scattering and secondary electron production.
2：Sample Selection and Data Sources:
The optical energy loss function for PMMA is derived from experimental data for energies below 33 eV (Ritsko et al., 1978) and calculated from optical absorption data of elements for higher energies.
3：List of Experimental Equipment and Materials:
No specific equipment or materials are listed; the simulation is computational.
4：Experimental Procedures and Operational Workflow:
Electron trajectories are simulated with random numbers determining scattering angles, energy losses, step lengths, and scattering types (elastic or inelastic). Secondary electrons are generated during inelastic scattering and their trajectories are similarly simulated until absorption or escape.
5：Data Analysis Methods:
Results include depth and energy distributions of secondary electrons, analyzed to infer their impact on energy loss distribution in PMMA.
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