1：Experimental Design and Method Selection:

The study involved depositing Al-Si-N coatings on quartz glass substrates using pulsed magnetron sputtering to investigate their phase composition, mechanical properties, and resistance to high-velocity particle impacts. X-ray diffraction and energy dispersive X-ray analysis were used for structural and compositional analysis, while nanoindentation measured mechanical properties. Impact tests were conducted using a light-gas gun to simulate micrometeoroid collisions.

2：Sample Selection and Data Sources:

Samples were made from polished quartz KV glass substrates (15 mm diameter, 4 mm thickness). Coatings of varying thicknesses (1-10 μm) were deposited by changing deposition time. Iron microparticles (average size 60 μm) were used for bombardment tests.

3：List of Experimental Equipment and Materials:

Equipment included UVN-05MI 'KVANT' device for magnetron sputtering, ZEISS LEO EVO-50XVP scanning electron microscope with EDX mod. INCA Energy microanalyzer, DRON-7 X-ray device, Nano Hardness Tester (CSM Instruments), and MPH23/8 light-gas gun. Materials included mosaic targets based on aluminum with silicon inserts, nitrogen and argon gases, and iron microparticles.

4：Experimental Procedures and Operational Workflow:

Coatings were deposited at 573 K with a nitrogen to argon ratio of 1:3. X-ray analysis used CoKα radiation. Nanoindentation was performed at 20 mN load. Impact tests involved bombarding samples with iron particles at 5-8 km/s velocity, and crater density was measured post-test using SEM.

5：X-ray analysis used CoKα radiation. Nanoindentation was performed at 20 mN load. Impact tests involved bombarding samples with iron particles at 5-8 km/s velocity, and crater density was measured post-test using SEM. Data Analysis Methods:

5. Data Analysis Methods: Data analysis included X-ray diffraction pattern interpretation using JCPDS database, calculation of microhardness and elastic properties via Oliver-Pharr method, and statistical analysis of crater density from SEM images.