研究目的
To investigate the effects of the geometric morphology of the sidewall on the extraction ef?ciency of GaN-based light-emitting diodes (LEDs) and improve light extraction efficiency through sidewall texturing.
研究成果
Sidewall texturing improves light extraction efficiency by reducing total internal reflection, with a 13.8% increase in light output intensity at 100 mA and no degradation in electrical properties. The geometric morphology of the sidewall is a key parameter for enhancing LED performance without adverse effects.
研究不足
The study focuses on specific geometric parameters (sine wave texture with 6 μm period and 1 μm height); optimization of shape and size for further improvement is suggested but not fully explored. Potential packaging issues and wafer dead space with chip shaping are mentioned but not addressed in detail.
1：Experimental Design and Method Selection:
Numerical analysis based on the ray-tracing method using LightTools software to simulate light extraction. Fabrication of LEDs with and without sidewall texturing for comparative study.
2：Sample Selection and Data Sources:
GaN-based LED structures grown on c-plane sapphire substrates using metal-organic chemical vapor deposition, with specific layer thicknesses and compositions. LEDs had an area of 750 × 750 μm2.
3：List of Experimental Equipment and Materials:
Metal-organic chemical vapor deposition system for growth, inductively coupled plasma etcher with Cl2/BCl3 source gas, e-beam evaporator for Cr/Au electrode deposition, parameter analyzer (HP 4155B), calibrated Si photodiode connected to an optical power meter, field effect-scanning electron microscopy (FE-SEM) for imaging.
4：Experimental Procedures and Operational Workflow:
Fabricate LEDs by etching ITO and p-GaN layers, deposit electrodes, perform sidewall texturing (sine wave shape with 6 μm period and 1 μm height), measure electrical properties (forward voltage, leakage current) and optical properties (light output intensity) at 100 mA injection current.
5：Data Analysis Methods:
Monte Carlo ray-tracing simulations to confirm enhanced photon extraction, comparison of light output intensities and efficiencies between textured and non-textured LEDs.
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