研究目的
Investigating the fabrication and performance of a new pyroelectric infrared detector structure using LiTaO3 single crystal with air gap thermal insulation.
研究成果
The integration of LiTaO3 with air gap thermal insulation using MEMS technology enhances pyroelectric detector performance, with larger air gap areas improving thermal uniformity and pyroelectric efficiency, suggesting potential for advanced infrared detection applications.
研究不足
The study is limited to specific air gap areas and may not cover all possible configurations; optimization of air gap dimensions and material choices could be further explored.
1：Experimental Design and Method Selection:
The study involved designing a pyroelectric infrared detector with an air gap thermal insulation structure fabricated using MEMS technology. Theoretical models for thermal performance and pyroelectric properties were employed.
2：Sample Selection and Data Sources:
LiTaO3 single crystal samples were used, prepared with different air gap areas.
3：List of Experimental Equipment and Materials:
MEMS fabrication equipment, LiTaO3 crystals, materials for air gap formation.
4：Experimental Procedures and Operational Workflow:
The detector was fabricated by bonding LiTaO3 to a substrate with an air gap, followed by characterization of pyroelectric and thermal properties.
5：Data Analysis Methods:
Pyroelectric coefficients and thermal time constants were measured and analyzed to assess performance improvements.
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